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Apparatus, system and method for sustaining inductively coupled plasma [Elektronski vir] = Vorrichtung, System und Verfahren zur Aufrechterhaltung von induktiv gekoppeltem Plasma = Appareil, système et procédé de maintien d'un plasma à couplage inductif : European patent specification EP 3 965 139 B1, 2024-03-27
Zaplotnik, Rok, 1981- ...
Type of material - patent
; adult, serious
Publication and manufacture - München : European Patent Office, 2024
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