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  • Multi-wafer rotating MEMS machines [Elektronski vir] : turbines, generators, and engines
    Type of material - e-book
    Publication and manufacture - New York ; London : Springer, 2009
    Language - english
    ISBN - 978-0-387-77747-4; 0-387-77747-4
    COBISS.SI-ID - 1541867231

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