Micromachining and microfabrication process technology XIII : 22-23 January 2008, San Jose, California, USA

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Micromachining and microfabrication process technology XIII : 22-23 January 2008, San Jose, California, USA

Type of material - proceedings of conference contributions ; adult, serious

Publication and manufacture - Belligham [USA] : SPIE, 2008

Language - english

ISBN - 978-0-8194-7057-7

COBISS.SI-ID - 3889690

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Maher, Mary-Ann | Society of Photo-Optical Instrumentation Engineers

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Proceedings of SPIE

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Maher, Mary-Ann

Source: Personal bibliographies and: SICRIS

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