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Focused ion beam induced dewetting of a thin Au film
Šetina, Barbara ...
Thin films, with their thickness in the few ten nanometers range, become unstable upon melting and self-organize into characteristic nanoscale patterns in the form of percolated networks and ...spherical droplets. Focused ion beam irradiation of a thin film leads to a similar pattern development, even though the melting mechanism is different and there are also sputtering effects to be taken into consideration (1). The proposed work focuses on gold thin film nanostructuring by dewetting. Thin films of Au were deposited on silicon substrates and irradiated with a Ga[sup]+ ion beam. The resulting patterns (see Figure 1) follow a series of characteristic steps, starting with roughening of the substrate, development of percolated networks and the final steps consist of a completely dewetted film, until all of the film is sputtered away by Ga[sup]+ ions. The patterns exhibits a characteristic length, which can be determined from the ring-shaped 2D FFT image, and it depends on the initial film thickness. The presented paper will discuss the characteristic pattern development under Ga[sup]+ ion irradiation of Au thin film, the temporal evolution and the thin film thickness dependence.
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