The main goal in our research work is achieving the complete automation of the Auger electron spectra processing and interpretation. To achieve this goal removal of the background and reduction of ...the noise are unavoidable preconditions. The spectra in both electron spectroscopies, namely Auger electron spectroscopy and X-ray photoelectron spectroscopy, consist of the characteristic peaks, the background[sup]1, and noise. Due to different modes of excitation in Auger electron spectroscopy and X-ray photoelectron spectroscopy, the level of background is different. In this work we analyzed a number of samples using both techniques and investigated the differences in both cases in order to come to some conclusion about the contribution of the backscattered electrons to the background.
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