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  • Optical Micro-and Nanometrology in Microsystems Technology, Strasbourg, France, 5-7 April, 2006
    Type of material - proceedings of conference contributions
    Publication and manufacture - Washington : The International Society for Optical Engineering, 2006
    Language - english
    ISBN - 0-8194-6244-6
    COBISS.SI-ID - 9388315

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