Karakterizacija tankih plasti za integrirana vezja : poročilo o raziskovalni nalogi za leto 1979

(UL)

Karakterizacija tankih plasti za integrirana vezja : poročilo o raziskovalni nalogi za leto 1979

Navinšek, Boris ...

Tankoplastne tehnologije za depozicijo tankih plasti. Raziskave mikroelektronskih tehnologij in aplikacij za industrijsko proizvodnjo.

Type of material - research report ; adult, serious

Publication and manufacture - Ljubljana : Institut "Jožef Stefan", 1979

Language - slovenian

COBISS.SI-ID - 12203520

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Author
Navinšek, Boris | Žabkar, Anton, 1949-1997 | Peternel, Martina | Škraba, Zora

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Library	Call number – location, accession no. ...	Copy status
National and University Library, Ljubljana	DS1- 8547 dislocirano skladišče - raziskovalne naloge	available - reading room
Central Technological Library of the University of Ljubljana	54677/XXVII-395/1979 Skladišče IN: 398000053	available - outside loan, loan period: 14 days

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Year	Impact factor		Edition		Category		Classification
Year	JCR	SNIP	JCR	SNIP	JCR	SNIP	JCR	SNIP

Links to authors' personal bibliographies	Links to information on researchers in the SICRIS system
Navinšek, Boris	00085
Žabkar, Anton, 1949-1997	03252
Peternel, Martina
Škraba, Zora	09863

Source: Personal bibliographies and: SICRIS

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