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Meritve gostote atomarnega kisika z optično katalitično sondo = Measurements of atomic oxygen density with fiber optics catalytic probeCvelbar, Uroš ...Pri tehnoloških postopkih selektivnega plazemskega jedkanja, plazemskega čiščenja, plazemske aktivacije površin polimernih in kompozitnih materialov ter hladnega upepeljevanja je glavni reaktant ... atomarni kisik, ki nastaja pri neprožnih trkih elektronov z molekulami v kisikovi plazmi. Gostota atomov kisika je zato pri omenjenih tehnologijah najpomembnejši parameter plazme. Za merjenje tega parametra lahko uporabimo optično spektroskopijo, masno spektrometrijo, NO titracijo in katalitične sonde. Predstavljamo optično katalitično sondo, ki smo jo razvili v naših laboratorijih. Z njo smo merili gostoto atomov kisika v plazemskem reaktorju. Ugotovili smo, da v tlačnem območju med 30 in 80 Pa gostota atomov približno linearno narašča z naraščajočim tlakom. S spreminjanjem položaja rekombinatorja v reaktorju smo izmerili gostoto ataomov kisika v odvisnosti od razdalje med konico rekombinatorja in sondo. Ugotovili smo, da je gostota atomov kisika v neposredni okolici sonde neodvisna od položaja rekombinatorja, dokler je le-ta večja od 10 cm. Pri krajših razdaljah pa gostota atomov kisika s približevanjem rekombinatorja sondi nagalo pada.Source: Materiali in tehnologije = Materials and technology. - ISSN 1580-2949 (Letn. 36, št. 5, 2002, str. 243-245)Type of material - article, component part ; adult, seriousPublish date - 2002Language - slovenian, englishCOBISS.SI-ID - 1537380
Author
Cvelbar, Uroš |
Mozetič, Miran, 1961- |
Poberaj, Igor, 1963- |
Babič, Dušan, fizika
Topics
plazma |
vakuum |
kisik |
atomi |
sonda |
vacuum |
plasma |
oxygen |
atoms |
probe
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source: Materiali in tehnologije = Materials and technology. - ISSN 1580-2949 (Letn. 36, št. 5, 2002, str. 243-245)
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Database name | Field | Year |
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Links to authors' personal bibliographies | Links to information on researchers in the SICRIS system |
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Mozetič, Miran, 1961- | 10429 |
Poberaj, Igor, 1963- | 08851 |
Babič, Dušan, fizika | 13497 |
Source: Personal bibliographies
and: SICRIS
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