The MoN/VN multilayer films with three modulation periods (Λ) were deposited on 718 alloy steel substrates by magnetron sputtering. The effects of Λ on microstructure, mechanical properties, and friction performance of the MoN/VN multilayer films at variously typical temperatures were systematically investigated. The results indicated that the cross-section of as-prepared films were all typically columnar structure, and the hardness and elastic modulus of the MoN/VN multilayer films increase with the reduction of the modulation period. The MoN/VN multilayer films with Λ = 22.66 nm showed the maximum H / E value of 0.052 among all the as-prepared films. In addition, the MoN/VN multilayer films exhibited better tribological properties under room temperature (25 ℃) and 700 °C due to the formation of slight wear and self-lubricating oxide films, respectively. Especially, the friction coefficient and wear rate of the MoN/VN multilayer films with Λ = 22.66 nm were as low as 0.29 and 1.37 × 10 –6 mm 3 /Nm at 700 °C, respectively. Diagrams of worn surface of the MoN/VN multilayer films with Λ = 22.66 nm and Λ = 4.77 nm at different tests temperature: (a, e) RT, (b, f) 300 °C, (c, g) 500 °C and (d, h) 700 °C. Graphic Abstract