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Shi, Yue; He, Liang; Guang, Fangcao; Li, Luhai; Xin, Zhiqing; Liu, Ruping
Micromachines (Basel), 08/2019, Volume: 10, Issue: 8Journal Article
Silicon oxynitride (SiN O ) is a highly promising functional material for its luminescence performance and tunable refractive index, which has wide applications in optical devices, non-volatile memory, barrier layer, and scratch-resistant coatings. This review presents recent developments, and discusses the preparation methods, performance, and applications of SiN O film. In particular, the preparation of SiN O film by chemical vapor deposition, physical vapor deposition, and oxynitridation is elaborated in details.
