Tomography of microstructures by scanning micro-RBS probe

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Tomography of microstructures by scanning micro-RBS probe

KINOMURA, A; TAKAI, M; MATSUO, T; SATOU, M; NAMBA, S; CHAYAHARA, A

Japanese Journal of Applied Physics, 07/1989, Volume: 28, Issue: 7

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Tomographic images of microstructures were nondestructively obtained by Rutherford backscattering (RBS) analysis using 1.8 MeV proton and helium ion microprobes. Multilayered Au stripes isolated by SiO 2 layers and a Ge island pattern below an SiO 2 capping layer were cross-sectionally imaged without cleaving the substrate or removing the upper layer. The agglomeration of the Ge island after zone-melting recrystallization (ZMR) could be detected by tomographic images.

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