Tritium amount retained in surface layers and release behavior from surface layers were examined using SS316L samples exposed to plasmas in the Large Helical Device and a commercial Cu–Be alloy plate. BIXS analyses and observation by SEM indicate that carbon and titanium deposited on the plasma-facing surface of the SS316L samples. Larger amount of tritium was trapped in the plasma-facing surface in comparison with the polished surface. Higher enrichment of tritium in surface layers was similarly found in the polished surface of both samples. The amount of surface tritium in both samples was almost same, while the bulk concentration of tritium in Cu–Be was much lower than that in SS316L. Tritium release from the SS316L and Cu–Be samples into water was examined by immersion experiments. Tritium elution was observed for both samples, but changes in the residual tritium amount in surface layers were different from each other.