E-resources
Peer reviewed
Open access
-
Jurca, T; Peters, A W; Mouat, A R; Farha, O K; Hupp, J T; Lohr, T L; Delferro, M; Marks, T J
Dalton transactions, 2017, Volume: 46, Issue: 4Journal Article
The synthesis of molybdenum oxo-amidinate complexes MoO (R AMD) AMD = N,N'-di-R-acetamidinate; R = Cy (2; cyclohexyl) and Pr (3), and their characterization by H, C NMR, X-ray diffraction, and thermogravimetric analysis is reported. Quartz-crystal microbalance and X-ray photoelectron spectroscopic studies confirm that 3 is an improved ALD precursor versus the R = t-butyl derivative for MoO film growth. Complex 3 is accessible in higher yields (80%+), is easier to handle without mass loss, and in conjunction with O as the second ALD reagent, yields nitride-free MoO films.
