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  • Ion transmission and characterization of ordered nanoporous alumina
    Razpet, Alenka ...
    Ordered nanoporous alumina samples with a pore diameter of 70 nm, an array period of 100 nm and several thicknesses were considered as possible masks forpattern transfer by MeV ion lithography. A ... simple procedure for the sample alignment using a 2 MeV He+ beam was utilized. The energy distributions of transmitted ions as well as backscattering spectra were studied in aligned andnon-aligned orientations. The best transmission, comparable to the relativesurface area covered by pores, was reached for 2 m thick samples and was independent on ion species. Although the transmission for thicker membranes was generally lower, it significantly depended on the quality of each individual sample. The presented ion beam technique can therefore be usedas a tool for the characterization of porous materials. The acceptance angle for transmission through pores and the effective atomic density of samples can be obtained from the experimental data and it is shown that nanoporous alumina can be used as a mask for MeV ion lithography.
    Vir: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms. - ISSN 0168-583X (Vol. 222, 2004, str. 593-600)
    Vrsta gradiva - članek, sestavni del
    Leto - 2004
    Jezik - angleški
    COBISS.SI-ID - 18609703

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