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  • Measurement of conductance of a sapphire sealed variable leak valve
    Avdiaj, Sefer ; Šetina, Janez ; Erjavec, Bojan, 1950-2023
    A variable leak valve (VLV) can be used for regulating throughput of process gases into the vacuum system. Gas flow through the VLV can be in different regimes: viscous, transition or molecular, ... depending on the upstream gas pressure. In our work we have investigated a pressure dependence of conductance of a sapphire sealed VLV. The conductance of the VLV was determined by measuring gas flow in known volume using the pressure rise method. The pressure rise was measured using a spinning rotor gauge while the upstream pressure was measured by capacitance diaphragm gauges. The conductance could be determined with a relative standard uncertainty of 1.2%. The measurements of the conductance were done for different settings of VLV. To reduce the influence of outgassing on the gas throughput measurement by the pressure rise method we have used a nonevaporable getter in the measurement volume. Argon and helium were used as test gases. As a result, the throughput of VLV for Ar could be measured down to 5x10[sup]{-10} mbar 1/s. The time stability of the VLV for conductance setting of 5x10[sup]{-10} l/s and fill pressures of Ar ranging from 2 mbar to 50 mbar was also determined. The relative uncertainty of the VLV conductance stability over time was on the order of 1.5%.
    Vir: Programme and book of abstracts (Str. 123)
    Vrsta gradiva - prispevek na konferenci
    Leto - 2012
    Jezik - angleški
    COBISS.SI-ID - 918954

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