The effect of a dielectric liquid on the tunability of capacitor operating in RF domains is evaluated. The RF measurement shows a high variation of the resonant frequency accompanied with a low ...insertion loss. Moreover, the fluid positions between electrodes modify the capacitance value up to Tr = 6660% at 600 MHz. The quality factor decreases in response of water filling from Qmax = 51.9 when it is empty to Qmin = 1.49 when it is fully filled. According to the finite-element method analysis, the change of the dielectric permittivity influences the capacitor performances. Essentially, the tuning range of the capacitance and the quality factor could reach, respectively: Tr = 7660% and Qmin = 35.
In this letter we evaluate the effect of a dielectric liquid on the tunability of capacitor operating in RF domains. The RF measurement shows a high variations of the resonant frequency accompanied ...with a low insertion loss. Moreover, the fluid positions between electrodes modifies the capacitance value up to Tr = 6660% at 600MHz. The quality factor decreases in response of water filling from Qmax = 51.9 when it is empty to Qmin = 1.49 when it is fully filled. According to the FEM analysis, the change of the dielectric permittivity influences the capacitor performances. Essentially, the tuning range of the capacitance and the quality factor could reach respectively: Tr = 7660% and Qmin = 35.-
A variable inductor based on liquid tuning has been fabricated and characterised. The fabrication process used an SU-8 channel obtained by spin coating and lamination. A 107% tuning range with high ...inductance from 5.4 to 2.6 nH is achieved. With no actuation, the peak quality factor is 12, and the self-resonance frequency is 4 GHz.
This paper reports on the design, fabrication and characterization of a new class of liquid RF variable inductor. These inductors have been designed for 2.5 GHz applications. SU8 laminated films have ...been used to realize the fluidic part of the inductance. Water and non toxic metal-liquid (Galinstan) are considered. The large contact area between the liquid and the spires lead to high variation ratio of the inductance with high quality factor. The proposed variable inductor is perspective key component for the multi-band RF circuits such as electrically controllable matching circuits and wide tuning range voltage controlled oscillator (VCO).
This paper shows the potentialities of merging MEMS and micromachining with SiGe technologies in order to speed up the performance of the next generation of front ends, in term of flexibility, ...reconfigurability and adaptability. MEMS technologies are presented, based on BCB materials and BAW materials. Special attention is paid to ensure full compatibility between IC and MEMS. We have shown that very innovative functions could be considered by using this MEMSIC concept.
RF MEMS fluidic variable inductor El Gmati, I; Fulcrand, R; Calmon, P ...
5th International Conference on Design & Technology of Integrated Systems in Nanoscale Era,
2010-March
Conference Proceeding
This paper presents a continuously variable inductor for Radiofrequency applications. The inductor is built using lamination of photosensitive films process. The variation principle is based on the ...change area of the loop inductor. The fluid moves between inter-spires distance and shortening the path length of the current through the structure; leading to reduction of the stored magnetic energy, and hence the inductance. A detailed electrical analysis is conducted to predict the tuning range of the inductor using simulation tools such as HFSS. At 3 GHz, the simulated inductor is continuously varied from 7 nH to 2.98 nH, i.e., the variable range is above 100%. The fact that the device is fabricated on glass process enhances the potential for system integration. The proposed variable inductor is perspective key component for the multi-band RF circuits such as electrically controllable matching circuits and wide tuning range voltage controlled oscillator (VCO).
A novel wireless and passive temperature sensor that utilizes microfluidic and liquid metal technologies for the temperature-dependent modification of the sensor's radar echo is introduced. Liquid ...metal is used to dynamically alter the number of antenna elements activated along a linear array configuration with respect to temperature. In this way, the sensed temperature value can be accurately quantified by the change in radar cross section (RCS) of the device. Simulation and measurements of the backscattered power of the temperature-reconfigurable array were performed to verify the concept and benchmark the sensitivity and temperature range of the sensor. This study is based on the number of elements activated by the short-circuiting of their gap through the temperature-expansion of liquid metal inside a bridging microfluidic channel. For the first time the remote measurement of temperature based on the RCS variability of a microfluidics-realized sensor is presented. It features an RCS range of 9 dBsm at 29.5 GHz corresponding to a tunable temperature range of at least 20°K and a resolution of 1.8 dBsm per element activated resulting in a temperature resolution around 4°K. It has to be noted that numerous major challenges encountered in the feeding and encapsulation of liquid metal inside microfluidic channels were addressed and preliminary guidelines for a novel generation of wireless sensors based on liquid metal and microfluidic technologies have been established for the first time.
Power capabilities of RF MEMS Ducarouge, B.; Dubuc, D.; Flourens, F. ...
2004 24th International Conference on Microelectronics (IEEE Cat. No.04TH8716),
2004, Letnik:
1
Conference Proceeding
This paper outlines the power capabilities of RF MEMS devices. It is shown the specific needs concerning the technology, the design and the geometry of the devices in order to circumvent ...self-actuation, AC electromigration, thermal effect and reliability.
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