A thermally actuated non-cantilever-beam microelectromechanical viscosity sensor is presented. The proposed device is based on thermally induced vibrations of a simple silicon diaphragm and its ...damping due to the surrounding fluid. This vibration viscometer device utilizes thermal actuation through an in situ resistive heater and piezoresistive sensing, both of which utilize CMOS compatible materials leading to an inexpensive and reliable system. Thermal analysis was performed utilizing temperature diodes in the silicon diaphragm to determine the minimum heater voltage pulse amplitude and time in order to prevent heat loss to the oil under test that would lead to local viscosity changes. Viscosity measurements were performed and compared to motor oil measured on a commercial cone-and-plate viscometer.
A novel nondestructive measurement technique is proposed to electrically monitor the depth of a trench etched in silicon for the purpose of process control in a manufacturing environment. A simple ...bipolar npn transistor can be constructed, the gain of which is shown to relate to the trench depth. The ratio of the injected emitter current to the captured collector current has demonstrated the ability to resolve variations in trench depth of less than 0.2 /spl mu/m. The proposed structure is studied using two-dimensional simulations and experiments. A case study of two different silicon reactive ion etch tools is offered to demonstrate the effectiveness of the proposed technique.
This paper describes the design of a silicon chip that integrates multiple sensors together to monitor a variety of fluid quality parameters. The MEMS universal fluid quality interrogation sensor ...(MUFINS) eliminates the need to design a new chip for every fluid that requires quality control. The MUFINS chip is capable of measuring temperature, viscosity, liquid level, humidity, conductivity, pH, chlorine, and optical properties such as color and turbidity.
In order to evaluate the effectiveness of teaching technique in Rochester Institute of Technology's EMCR870-microelectromechanical systems course, the authors conducted a survey to evaluate this ...course . The student's answers are classified based on their previous background. Preliminary data shows that students with previous work experience are more likely to be successful in this type of teaching setting while those without it seem to struggle but benefit the most. Surveys have also been sent out to alumnae of the course to assess how this type of teaching setting has helped them in their current jobs. Results of these surveys were presented.
We report scholarship and learning activities in Rochester Institute of Technology (RIT) in areas of micro-electromechanical systems (MEMS) and nanotechnology. Microsystems may integrate ...microelectronics, nano and MEMS technologies and solutions. To enable integrated transformative scholarship and learning, fundamental and applied research is conducted at the state-of-the-art Microsystems Fabrication Facilities. Contributing to research in core areas of critical importance of science, technology, engineering and mathematics (STEM), undergraduate and graduate MEMS and Nanotechnology courses are developed and offered. The MEMS curriculum includes MEMS Design, MEMS Fabrication and MEMS Evaluation courses. The Nanotechnology curriculum comprises an undergraduate Nano Science, Engineering and Technology (NanoSET) course, as well as a graduate Fundamentals of Micro and Nano Engineering course. To meet overall and specific educational goals and objectives, we facilitate course and curriculum developments focusing on active learning, scholarship, effective teaching and pedagogy. These activities advance a STEM knowledge base. Our courses and educational activities positively contribute to STEM transformative developments. In order to enable learning and scholarship, faculty, professionals and students are engaged in discoveries, innovations and knowledge base generation. These attributes are achieved by means of advanced designs, analyses, fabrication and test of various MEMS and microsystems. Methods, concepts, tools and algorithms of computational and applied mathematics are used. Our research, capstone and laboratory projects enable STEM education, advance fundamental findings, facilitate research, support discoveries and enrich training. High-performance microsystems and MEMS are devised, designed, analysed, fabricated and evaluated. We advance technology readiness levels, ensure technology transfer and enable commercialization capacity.
A non-cantilever-beam micro-electro-mechanical (MEMS) based viscosity sensor is proposed. This novel vibration viscometer device utilizes thermal actuation and piezoresistive sensing. As the ...actuation bias is kept constant, viscosity changes can be correlated to changes in the oscillation amplitude. This proposed solution is CMOS compatible, inexpensive and reliable. This paper investigates the vertical movement of thin silicon/aluminum bimetal diaphragms with varying bimetal areas and diaphragm thickness to better understand the thermo- mechanical behavior of the proposed actuator/sensor device. Proof of concept results are presented in which the oscillation amplitude of the bimetal actuator changes when the device is immersed in media of different viscosity.
To assess computed tomography (CT) imaging findings in progressive primary tuberculosis and to determine the use of the multislice images obtained.
We report the case of a 37-day-old infant admitted ...to hospital because of persistent fever despite antimicrobial therapy. Thoracic X-ray and multislice helical CT (CT Light speed i1.6 GE) were performed with 3-dimensional and virtual endoscopy reconstructions.
CT showed mediastinal and hilar necrotic lymph nodes, pulmonary parenchymal involvement with miliary pattern, and multiple cavitated consolidations. Endobronchial involvement was clearly visualized by virtual endoscopy and was confirmed by fiberoptic bronchoscopy.
Virtual endoscopy is a new, less invasive alternative radiological technique to fiberoptic bronchoscopy that may influence the management of patients with tuberculosis with endobronchial involvement.
Nano and microelectromechanical systems courses Lyshevski, S. E.; Fuller, L. L.; Puchades, I. ...
2011 11th IEEE International Conference on Nanotechnology,
2011-Aug.
Conference Proceeding
This paper reports the developments of modular courses and curricula in nano- and microelectromechanical systems (MEMS). We design a Nano Science, Engineering and Technology (NanoSET) course as well ...as MEMS curriculum. The MEMS curriculum consists of three courses, e.g., MEMS Design, MEMS Fabrication and MEMS Evaluation. The role and implication of quantum mechanics, nanotechnology, microscopic systems, molecular engineering, microelectronics and MEMS are examined. We discuss the integration of quantum physics, electronics, microsystems and nanotechnology in engineering and science curricula. Coherent, cohesive and consistent courses' coverage spans from the first principles and basic fundamentals to design, analysis, fabrication, testing, characterization and evaluation of macroscopic devices and systems. The developed courses ensure the overall educational, professional and curriculum objectives and goals.
This paper describes a simple, reliable; bulk micro- machined, micro-electro-mechanical system (MEMS) process flow for the fabrication of a wide variety of devices which has been implemented within ...the Microelectronic Engineering Department at the Rochester Institute of Technology. The fabrication and testing results for thermopiles, pressure sensors, micro-speakers, micro- pumps, accelerometers and inductors in a ten week fabrication course are reported.
This paper describes a simple, reliable; bulk micro- machined, micro-electro-mechanical system (MEMS) process flow for the fabrication of a wide variety of devices which has been implemented within ...the Microelectronic Engineering Department at the Rochester Institute of Technology. The fabrication and testing results for pressure sensors, flow sensors, micro-pumps, and micro- fluidic packaging in a ten week fabrication course are reported.
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