In this paper a systematic approach to calibrating resist parameters will be provided. The calibration procedure couples nonlinear least squares fitting algorithms with a lithography simulator to ...achieve the best match between lithographic data and simulation. The importance of calibrating resist parameters using multiple data sets to achieve a unique and predictive model will be discussed. Several examples will be given for chemically amplified resists.
Data analysis for photolithography Mack, Chris A.; Legband, Dale A.; Jug, Sven
Microelectronic engineering,
1999, Letnik:
46, Številka:
1
Journal Article, Conference Proceeding
Recenzirano
This paper will propose standard methodologies for analyzing common lithographic data in three areas: photoresist contrast curves, swing curves, and focus-exposure matrices. For each data type, ...physics-based algebraic equations will be proposed to fit to the data. The equations will be fit to the data using standard non-linear least-squares fitting algorithms with standard statistical tests for removing data flyers and options for weighting the data. Analysis of the resulting curve fits will provide important information about the data.
Our paper focuses on differences in sensation seeking between male and female athletes who engage in high risk sports. There are several studies (Cox, 1994; Tusak & Tusak, 2001; Erjavec, 2002), which ...indicate that male and female athletes are more similar than males and females in the general population, female athletes thus show more "traditionally male" characteristics. These studies mainly focus on personality, anxiety and aggression; we wanted to address these issues in the area of sensation seeking. Sensation seeking has been well researched in the area of high risk sports - males seem to have higher sensation seeking needs, but gender diff erences in high risk sports have been quite poorly investigated. Of 33 mountain climbers who participated in our research, 15 of them were male and 18 female and diff erences in age were not signifi cant. We used Zuckerman's Sensation seeking scale IV, which examines sensation seeking in terms of 5 factors - a general factor, factors of adventure and risk taking, an experience seeking factor, a disinhibition factor and a boredom susceptibility factor. There were no diff erences found between male and female mountain climbers, except for a tendency toward statistical signifi cance in the factor of disinhibition, which is consistent with some previous research. We conclude that male and female mountain climbers in Slovenia are equal in sensation seeking needs and can be treated as a homogenous sample.
