E-viri
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Fischer-Cripps, Anthony C.
Nanoindentation, 08/2011Book Chapter
Interest in nanoindentation has spawned a number of nanoindentation instruments that compete on a world market. Purchasers of such instruments are usually universities, private and government research organisations, and quality control laboratories. There is particular interest within the semiconductor industry that is concerned with the mechanical properties of a wide range of thin films.
