► Growth processes of Lu2SiO5:Ce and Y2SO5:Ce single crystalline films onto Y2SO5:Ce substrates by liquid phase epitaxy method. ► Comparison of the luminescence properties of Lu2SiO5:Ce and Y2SO5:Ce crystals and films. ► Influence of lead flux related impurity on the properties of Lu2SiO5:Ce and Y2SO5:Ce films. Single crystalline films (SCFs) of undoped and Ce3+ doped Y2SiO5 (YSO) and Lu2SiO5 (LSO) orthosilicates were crystallized for the first time by liquid phase epitaxy method onto undoped YSO substrates from melt-solution based on PbO–B2O3 flux. The scintillation and luminescent properties of YSO:Ce and LSO:Ce SCFs were compared with the properties of bulk single crystal counterparts. We show that the peculiarities of luminescent properties of YSO:Ce and LSO:Ce SCFs in comparison with the crystal analogues are caused by the different distribution of Ce3+ ions over Y1/Lu1 and Y2/Lu2 positions of YSO and LSO host and strong influence of Pb2+ flux-related impurity on luminescent properties of Ce3+ ions.