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  • Fabrication and characteris...
    Ting-Chou Chang; Chien-Hsing Chen; Wei-Hung Shih; Jian-Neng Wang; Chai-Yu Lee; Jaw-Luen Tang; Shau-Chun Wang; Lai-Kwan Chau; Wei-Te Wu

    2011 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP)
    Conference Proceeding

    This study investigates the fabrication characteristics of a femtosecond fiber laser on a fused-silica-based optical waveguide. The wavelength and repetition rate of the femtosecond fiber laser are 532 nm and 1 MHz, respectively. We selected three main fabrication parameters for systematic adjustment: laser power (E), scanning speed (ν s ) and focus depth (d = 0 at the surface of substrate). We succeeded in fabricating a waveguide layer inside the silica subtracts. By analyzing the light translation path and the net fluence in the waveguide, the range of fabrication energy of the waveguide on the fused silica was kept within 0.973 - 1.438 KJ/cm 2 .