Replication processes offer a number of considerable advantages for the production of micro components. This is not limited to the high economic efficiency achieved by numerous multiplications of master structures. Furthermore, micro devices can be produced of nearly every kind of material by one or a sequence of replication steps. In this contribution, five important processes of micro replication will be described, reflecting the wide variety from rapid prototyping over small and medium series to mass production. For future development, three main trends can be observed: the steady further miniaturization of shaping capability, the efforts to increase economic efficiency mainly by reducing cycle times and enlarging work areas, and the different approaches to combine shaping and joining procedures thus obtaining a minimum of process steps.