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Field effect transistor test structures for inter-strip isolation studies in silicon strip detectorsHinger, V.; Bergauer, T.; Blöch, D.; Dragicevic, M.; Moscatelli, F.; Paulitsch, P.; Valentan, M.
Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 04/2020, Letnik: 958Journal Article
Its radiation resilience has established p-type silicon as tracking detector baseline material in upcoming high-luminosity physics experiments. Electric isolation of n+ electrodes with p+ implants (p-stop or p-spray) is crucial for segmented p-type sensor quality. P+ doping concentration, implantation depth, and geometry determine the achievable resistance between segments. Typically, inter-strip resistance is measured directly on the strip sensors. Large resistances on the order of 100GΩ require precise, low-noise current measurements, which are strongly influenced by parasitic currents. To provide a comparably simple alternative to measurements on strip sensors, this contribution seeks to relate Metal-Oxide–Semiconductor Field-Effect Transistor (MOSFET) threshold voltage to sensor inter-strip resistance. We utilize circular MOSFET test structures fabricated on the same wafers as the strip sensors. This paper compares measurements of MOSFETs and strip sensors on wafers with different n- and p-spray implantations and presents comparative TCAD simulations. MOSFET test structures could present a fast option to judge silicon sensor inter-strip resistance and strip isolation properties. Process quality control during future series productions can benefit from this technique. •MOSFET structures are used to probe n-type silicon sensor inter-strip resistance.•Simulations and measurements for different n- and p-spray implantations are shown.•Relationship of MOSFET threshold voltage and inter-strip resistance is nonlinear.•Resistance and threshold voltage are sensitive to dopant implantation depth.•MOSFET measurements are useful for large-scale sensor process quality control.
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Leto | Faktor vpliva | Izdaja | Kategorija | Razvrstitev | ||||
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JCR | SNIP | JCR | SNIP | JCR | SNIP | JCR | SNIP |
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in: SICRIS
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