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  • Nanoimprint lithography of ...
    Barcelo, Steven J.; Wu, Wei; Li, Xuema; Li, Zhiyong; Williams, R. Stanley

    Applied physics. A, Materials science & processing, 11/2015, Letnik: 121, Številka: 2
    Journal Article

    In this review, we describe the use of nanoimprint lithography in our group to fabricate plasmonic platforms with nanometer-scale critical features that would be significantly more expensive using other fabrication techniques: 3-D cones that have tips with a sub-10 nm radius of curvature, active polygonal nanofingers with sub-2 nm spacing, and deterministic nanoparticle assemblies both on arbitrary substrates and in solution. These nanostructures were primarily designed to make surface-enhanced Raman Scattering a viable analytical technique for low-level chemical and biological contaminants, but the same fabrication methods should also be useful for other nanophotonic and nanoelectronic applications.