E-viri
Recenzirano
-
Kainz, A.; Hortschitz, W.; Schalko, J.; Jachimowicz, A.; Keplinger, F.
Sensors and actuators. A. Physical., 12/2015, Letnik: 236Journal Article
•We present a way to utilize the air damping as a design feature for laterally oscillating MEMS/MOEMS.•We show that it is possible to adjust the passive damping in a wide range.•MOEMS vibration sensors with different quality factors are presented confirming the results of the underlying analytical and numerical models. The damping of an oscillator is, next to the effective mass and the stiffness, one of the key parameters that determine its frequency response as well as its noise. Since there are numerous different applications for oscillating microstructures, there are also numerous requirements for the shape of the respective resonance peak. While fabricating the right mass and stiffness to obtain a desired resonance frequency is, in general, a basic task, designing a micro-oscillator featuring an intended damping is not trivial. We present a way of utilizing the surrounding air to adjust the passive damping of a laterally oscillating micromechanical system. This is shown to hold in a relatively wide range by comparing analytical models and finite volume method simulations with measurements of a number of micro-electro-mechanical test structures with optical readout.
Vnos na polico
Trajna povezava
- URL:
Faktor vpliva
Dostop do baze podatkov JCR je dovoljen samo uporabnikom iz Slovenije. Vaš trenutni IP-naslov ni na seznamu dovoljenih za dostop, zato je potrebna avtentikacija z ustreznim računom AAI.
Leto | Faktor vpliva | Izdaja | Kategorija | Razvrstitev | ||||
---|---|---|---|---|---|---|---|---|
JCR | SNIP | JCR | SNIP | JCR | SNIP | JCR | SNIP |
Baze podatkov, v katerih je revija indeksirana
Ime baze podatkov | Področje | Leto |
---|
Povezave do osebnih bibliografij avtorjev | Povezave do podatkov o raziskovalcih v sistemu SICRIS |
---|
Vir: Osebne bibliografije
in: SICRIS
To gradivo vam je dostopno v celotnem besedilu. Če kljub temu želite naročiti gradivo, kliknite gumb Nadaljuj.