E-viri
PDF
Recenzirano
Odprti dostop
-
Kumar, N.; El Gawhary, O.; Roy, S.; Pereira, S. F.; Urbach, H. P.
Journal of the European Optical Society. Rapid publications, 01/2013, Letnik: 8Journal Article
Non-interferometric phase retrieval from the intensity measurements in Coherent Fourier Scatterometry (CFS) is presented using a scanning focused spot. Formulae to determine the state of polarization of the scattered light and to retrieve the phase difference between overlapping scattered orders are given. The scattered far field is rigorously computed and the functionality of the method is proved with experimental results.
