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Ring, Sven; Kirner, Simon; Schultz, Christof; Sonntag, Paul; Stannowski, Bernd; Korte, Lars; Schlatmann, Rutger
IEEE journal of photovoltaics, 07/2016, Letnik: 6, Številka: 4Journal Article
A novel emitter patterning method for back-contacted Si heterojunction solar cells is presented, which combines laser processing and wet etching of a mask layer stack with self-aligned repassivation, thus reducing the process complexity, as compared with the commonly used emitter patterning methods. Lifetime samples demonstrate that with a suitable mask stack, laser scribing can be performed without inducing laser damage to the passivation. Despite nonoptimal wet etch and repassivation processes which currently limit the obtained lifetime, proof-of-concept cells on p-type wafers fabricated using this novel emitter patterning process and lithographically patterned metallization exhibit an open-circuit voltage of 694 mV and pseudo-fill-factors of 83%. With the laser written mask layers for etching and self-aligned passivation process, we have thus developed the proof-of-concept for a simple, lithography free, and contactless emitter patterning method for industrial applications.
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