Intelligent aeroengine requires high temperature sensors, especially MEMS thin film sensors directly fabricated on the surface of turbine blade. For this purpose, an electrical insulation layer is needed on blade substrate metals. However, the electrical insulation of ceramic materials will degrade at high temperatures, thereby affecting the characteristics of the sensor. In this paper, ceramic material of YSZ thermal barrier coating (TBC) formulation was modified by adding a certain amount of Al2O3 to improve its insulation at high temperatures. Micro processing was carried out on the surface of the TBC, including the fabrication of platinum-point thermocouples and thermal resistor on TBC surface, and high temperature electrical insulation properties of the modified TBC were studied. Results show that electrical insulation can be improved several orders of magnitude with adding Al2O3 which meets the requirement to build reliable thin film sensors on the top of TBC surface coated on turbine blade metals. Several verification experiments were carried out to ensure the working ability of TBC layer, including robustness test, thermal shock test and high temperature retention test.