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Machida, T.; Miyazawa, A.; Yokosawa, Y.; Nakaya, H.; Tanaka, S.; Nunoi, T.; Kumada, H.; Murakami, M.; Tomita, T.
Solar energy materials and solar cells, 11/1997, Letnik: 48, Številka: 1Journal Article
To develop a technology of forming grooves for low cost cell production, a multi-blade wheel grinding method was investigated. The process time of groove formation on the surface of 10 × 10 cm 2 polycrystalline silicon substrate was reduced to 30 s by a newly developed high-speed groove formation machine. Simultaneous formation of junction and anti-reflection coating by atmospheric pressure chemical vapor deposition (APCVD) technique was also investigated. For electrodes formation process, single firing method for both side electrodes made possible to simplify the firing process and to speed up from a conventional speed of 400 mm/min to 5000 mm/min.
