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Kim, J.-G.; Lee, T.-J.; Park, N.-C.; Park, Y.-P.; Park, K.-S.
Sensors and actuators. A. Physical., 01/2013, Letnik: 189Journal Article
High-speed gap measurement in the nano/micrometer range presents unique engineering challenges. A signal conditioner is required for capacitive sensors to amplify, denoise, and restrict the bandwidth. In this work, a capacitive sensor was used in combination with a SAW device that serves as a signal conditioner. The proposed system provides 2.75MHz bandwidth through amplitude modulation using the center frequency of the SAW device as a carrier signal and has outstanding signal conditioning capabilities. Construction and characterization of a SAW-based capacitive gap sensor to measure a 200Hz gap frequency are described.
