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Begrambekov, L B; Bidlevich, O A; Grunin, A V; Dovganyuk, S S; Zakharov, A M; Kaplevsky, A S; Sadovskiy, Ya A
Journal of physics. Conference series, 11/2018, Letnik: 1121, Številka: 1Journal Article
In the paper, a simple and easy to operate stand is presented that allows irradiating the surface of solids by gas discharge plasma ions in the energies ranging from 5 to 40 keV. The results of first experiments are shown. Ion current parameters on the irradiated sample using gas discharge are presented for different gases.
