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  • TiSi2 formation during annealing of sputtered Ti, Ti/TiN and TiNx thin films
    Panjan, Peter, 1957- ...
    Source: Vacuum. - ISSN 0042-207X (Vol. 40, 1990, str. 169-171)
    Type of material - article, component part
    Publish date - 1990
    Language - english
    COBISS.SI-ID - 14115111

source: Vacuum. - ISSN 0042-207X (Vol. 40, 1990, str. 169-171)
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