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Fundamentals of microfabrication and nanotechnology. Vol. 1, Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnologyMadou, Marc J.Type of material - textbook ; adult, seriousEdition - 3rd ed.Publication and manufacture - Boca Raton ; London ; New York : CRC Press, cop. 2012Language - englishISBN - 978-1-4200-5511-5COBISS.SI-ID - 13981238
Author
Madou, Marc J.
Topics
nanotehnologija |
fizika trdnega stanja |
proizvodno inženirstvo |
silicij |
integrirana vezja |
MEMS |
NEMS |
kristalografija |
kvantna mehanika |
silicijevi monokristali |
fluidika |
analizne metode |
elektrokemične metode |
optične analizne metode |
mikroelektromehanski elementi |
industrijske aplikacije |
bioinženiring |
bio mikroelektromehanski elementi |
nanoelektromehanski elementi |
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Madou, Marc J. | ![]() |
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