E-resources
Peer reviewed
-
Omote, Kazuhiko
Journal of physics. Condensed matter, 12/2010, Volume: 22, Issue: 47Journal Article
We have measured the strain of a thin Si layer deposited on a SiGe layer using a high resolution x-ray diffraction system. The Si layer was deposited on the SiGe layer in order to introduce a tensile strain to the Si layer. To measure the in-plane lattice constant accurately, we have employed so-called grazing-incidence in-plane diffraction. For this measurement, we have made a new five-axis x-ray goniometer which has four ordinal circles (ω, 2θ, χ, φ) plus a counter-χ-axis for selecting the exit angle of the diffracted x-rays. In grazing-incidence geometry, an incident x-ray is focused on the sample surface in order to obtain good diffraction intensity even though the layer thickness is less than 5 nm. Because diffracted x-rays are detected through analyzer crystals, the diffraction angle can be determined with an accuracy of ± 0.0003°. This indicates that the strain sensitivity is about 10( - 5) when we measure in-plane Si 220 diffraction. Use of x-ray diffraction could be the best standard metrology method for determining strain in thin layers. Furthermore, we have demonstrated that incident/exit angle selected in-plane diffraction is very useful for height/depth selective strain determination.
Author
![loading ... loading ...](themes/default/img/ajax-loading.gif)
Shelf entry
Permalink
- URL:
Impact factor
Access to the JCR database is permitted only to users from Slovenia. Your current IP address is not on the list of IP addresses with access permission, and authentication with the relevant AAI accout is required.
Year | Impact factor | Edition | Category | Classification | ||||
---|---|---|---|---|---|---|---|---|
JCR | SNIP | JCR | SNIP | JCR | SNIP | JCR | SNIP |
Select the library membership card:
If the library membership card is not in the list,
add a new one.
DRS, in which the journal is indexed
Database name | Field | Year |
---|
Links to authors' personal bibliographies | Links to information on researchers in the SICRIS system |
---|
Source: Personal bibliographies
and: SICRIS
The material is available in full text. If you wish to order the material anyway, click the Continue button.