Effect of deposition temperature on reactively sputtered CdS:O

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Effect of deposition temperature on reactively sputtered CdS:O

Grice, Corey R.; Paudel, Naba R.; Chuanxiao Xiao; Yanfa Yan

2014 IEEE 40th Photovoltaic Specialist Conference (PVSC), 2014-June

Conference Proceeding

Thin films of CdS and CdS:O were deposited using RF magnetron sputtering at room temperature and at 270 °C in sputtering ambient with 0-4% O 2 (balance Ar). These films were characterized with respect to their optical and structural properties. The samples were then subjected to a heat treatment similar to that experienced during CdTe closed space sublimation deposition, after which the samples were re-characterized.

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Grice, Corey R. | Paudel, Naba R. | Chuanxiao Xiao | Yanfa Yan

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