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Meng, Junhua; Zhang, Xingwang; Wang, Ye; Yin, Zhigang; Liu, Heng; Xia, Jing; Wang, Haolin; You, Jingbi; Jin, Peng; Wang, Denggui; Meng, Xiang‐Min
Small (Weinheim an der Bergstrasse, Germany), 05/2017, Volume: 13, Issue: 18Journal Article
Atomically thin hexagonal boron nitride (h‐BN) is gaining significant attention for many applications such as a dielectric layer or substrate for graphene‐based devices. For these applications, synthesis of high‐quality and large‐area h‐BN layers with few defects is strongly desirable. In this work, the aligned growth of millimeter‐size single‐crystal h‐BN domains on epitaxial Ni (111)/sapphire substrates by ion beam sputtering deposition is demonstrated. Under the optimized growth conditions, single‐crystal h‐BN domains up to 0.6 mm in edge length are obtained, the largest reported to date. The formation of large‐size h‐BN domains results mainly from the reduced Ni‐grain boundaries and the improved crystallinity of Ni film. Furthermore, the h‐BN domains show well‐aligned orientation and excellent dielectric properties. In addition, the sapphire substrates can be repeatedly used with almost no limit. This work provides an effective approach for synthesizing large‐scale high‐quality h‐BN layers for electronic applications. The aligned growth of 0.6 mm single‐crystal hexagonal boron nitride (h‐BN) domains is realized on epitaxial Ni(111)/sapphire by ion beam sputtering deposition. The formation of large‐size h‐BN domains results mainly from the reduced Ni‐grain boundaries and the improved crystallinity of the Ni film. In addition, the h‐BN domains show well‐aligned orientation and excellent dielectric properties.
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