Characterization progress of a UV-microscope recently implemented at the PTB Nanometer Comparator for uni- and bidirectional measurements

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Characterization progress of a UV-microscope recently implemented at the PTB Nanometer Comparator for uni- and bidirectional measurements

Krüger, Jan; Köning, Rainer; Bodermann, Bernd

EPJ Web of Conferences, 2020, Volume: 238

Journal Article, Conference Proceeding

In this contribution, we emphasize the need for a sophisticated characterization of measurement devices in particular for optical bidirectional measurements. As an example, the ongoing characterization of the UV-microscope at PTB’s linescale comparator is presented. First results of spectroscopic measurements of the employed UV-LED are presented and the impact of deviations in the center wavelength of the LED on the measurements are illustrated by rigorous simulations.

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Krüger, Jan | Köning, Rainer | Bodermann, Bernd

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