Aim To produce a framework for the development of a qualitative semi‐structured interview guide. Background Rigorous data collection procedures fundamentally influence the results of studies. The semi‐structured interview is a common data collection method, but methodological research on the development of a semi‐structured interview guide is sparse. Design Systematic methodological review. Data sources We searched PubMed, CINAHL, Scopus and Web of Science for methodological papers on semi‐structured interview guides from October 2004–September 2014. Having examined 2,703 titles and s and 21 full texts, we finally selected 10 papers. Review methods We analysed the data using the qualitative content analysis method. Results Our analysis resulted in new synthesized knowledge on the development of a semi‐structured interview guide, including five phases: (1) identifying the prerequisites for using semi‐structured interviews; (2) retrieving and using previous knowledge; (3) formulating the preliminary semi‐structured interview guide; (4) pilot testing the guide; and (5) presenting the complete semi‐structured interview guide. Conclusion Rigorous development of a qualitative semi‐structured interview guide contributes to the objectivity and trustworthiness of studies and makes the results more plausible. Researchers should consider using this five‐step process to develop a semi‐structured interview guide and justify the decisions made during it.