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  • Effect of surface structure on depth resolution of AES sputter depth profiles of Ni/Cr multilayers
    Zalar, Anton ; Praček, Borut ; Panjan, Peter, 1957-
    Crystalline structure and surface roughness of sputter depth profiled multilayers have a strong influence on the depth resolution of AES composition-depth prifiles. The influence of surface layers on ... the broadening of the interfaces in the Ni/Cr multilayers was studied on three different sputter deposited samples: (a) on a Ni/Cr multilayer composed of 16 alternating Ni and Cr layers with a single layer thichness of about 30 nm, which were deposited onto smooth Si(111) substratates, (b) the second sample had an amorphous Ta[sub]2O[sub]5 layer about 5o nm thick with a smooth surface on top of the Ni/Cr multilayer, and (c) the third Ni/Cr multilayer sample was covered with a crystalline Al layer with an average thickness of about 40 nm and with a relataively large average surface roughness (R[sub]a = 21,5 nm) in comparison with first two samples (R[sub]a < 1 nm). The thickness of the individual layers were measured using a quartz crystal microbalance during sputter deposition. After the deposition, the microstructure and the thicknesses of the individual layers were controlled using a cross-sectional transmition electron microscopy (TEM). All three types of the samples were AES sputter depth profiled with and without sample rotation, using two simetrically inclined 1 keV Ar[sup]+ ion beams at a 47° incidence angle. The surface roughness of as-deposited and selected ion sputtered samples were measured using atomic force mycroscopy (AFM). Both, the uncovered Ni/Cr multilayer and that covered with the amorphous Ta[sub]2O[sub]5 layer with smooth surfaces showed sharp intefaces with the depth resolution approximately of the same order of magnitude. However, the sample covered with the crystalline Al layer showed a strong broadening of the interfaces in the Ni/Cr multilayer. The sputter depth profiling of the sample with the initially rough Al surface layer caused topographical changes in-depth of the Ni/Cr multilayer and the originally sharp internal surfaces were broadened. However, the rotational AES depth profiling of the same Ni/Cr sample covered with the rough Al surface layer at a grazing ion incidence angle of about 80° enabled us to achieve a substantially improved depth resolution. The sample rotation at a large ion incidence angle promotes the smoothing effect and decreases the microroughness of the sample surface.
    Vir: Abstracts (Str. 79)
    Vrsta gradiva - prispevek na konferenci ; neleposlovje za odrasle
    Leto - 1999
    Jezik - angleški
    COBISS.SI-ID - 42466

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