Nanophotonic Image Sensors Chen, Qin; Hu, Xin; Wen, Long ...
Small (Weinheim an der Bergstrasse, Germany)
12, Številka:
36
Journal Article
Recenzirano
Odprti dostop
The increasing miniaturization and resolution of image sensors bring challenges to conventional optical elements such as spectral filters and polarizers, the properties of which are determined mainly ...by the materials used, including dye polymers. Recent developments in spectral filtering and optical manipulating techniques based on nanophotonics have opened up the possibility of an alternative method to control light spectrally and spatially. By integrating these technologies into image sensors, it will become possible to achieve high compactness, improved process compatibility, robust stability and tunable functionality. In this Review, recent representative achievements on nanophotonic image sensors are presented and analyzed including image sensors with nanophotonic color filters and polarizers, metamaterial‐based THz image sensors, filter‐free nanowire image sensors and nanostructured‐based multispectral image sensors. This novel combination of cutting edge photonics research and well‐developed commercial products may not only lead to an important application of nanophotonics but also offer great potential for next generation image sensors beyond Moore's Law expectations.
Nanophotonic structures including nano‐scatters, nanoholes and metamaterials show the capabilities for spectral filtering and possess advantages over pigment‐based filters such as robust stability, tunability, high compactness, improved process compatibility. A typical application is to integrate nanophotonic filters into image sensors with the potential to suppress the crosstalk, improve the resolution and enable on‐chip spectroscopy.
Three primary color (red, green and blue) filters consisting of subwavelength triangular-lattice hole arrays in an aluminum film on glass were simulated and fabricated. A silicon dioxide cap layer, ...deposited on the patterned aluminum film, was found to almost double the transmission efficiency for all the filters. The measured peak transmittance for each color filter was above 30%, exhibiting a wavelength spectrum with a full-width at half-maximum of approximately 100 nm. Simulation results of various structures with different cap layers revealed the enhanced coupling between surface plasmon resonances at both sides of the metal film in a symmetrical configuration. It was found that gratings with as few as three periods were sufficient to demonstrate filtering. The effect of metal thickness and hole size was investigated in detail.
Hydrogen energy is a zero-carbon replacement for fossil fuels. However, hydrogen is highly flammable and explosive hence timely sensitive leak detection is crucial. Existing optical sensing ...techniques rely on complex instruments, while electrical sensing techniques usually operate at high temperatures and biasing condition. In this paper an on-chip plasmonic-catalytic hydrogen sensing concept with a concentration detection limit down to 1 ppm is presented that is based on a metal-insulator-semiconductor (MIS) nanojunction operating at room temperature and zero bias. The sensing signal of the device was enhanced by three orders of magnitude at a one-order of magnitude higher response speed compared to alternative non-plasmonic devices. The excellent performance is attributed to the hydrogen induced interfacial dipole charge layer and the associated plasmonic hot electron modulated photoelectric response. Excellent agreements were achieved between experiment and theoretical calculations based on a quantum tunneling model. Such an on-chip combination of plasmonic optics, photoelectric detection and photocatalysis offers promising strategies for next-generation optical gas sensors that require high sensitivity, low time delay, low cost, high portability and flexibility.
Synthetic fractals inherently carry spatially encoded frequency information that renders them as an ideal candidate for broadband optical structures. Nowhere is this more true than in the terahertz ...(THz) band where there is a lack of naturally occurring materials with valuable optical properties. One example are perfect absorbers that are a direct step toward the development of highly sought after detectors and sensing devices. Metasurface absorbers that can be used to substitute for natural materials suffer from poor broadband performance, while those with high absorption and broadband capability typically involve complex fabrication and design and are multilayered. Here, we demonstrate a polarization-insensitive ultrathin (∼λ/6) planar metasurface THz absorber composed of supercells of fractal crosses capable of spanning one optical octave in bandwidth, while still being highly efficient. A sufficiently thick polyimide interlayer produces a unique absorption mechanism based on Salisbury screen and antireflection responses, which lends to the broadband operation. Experimental peak absorption exceeds 93%, while the average absorption is 83% from 2.82 THz to 5.15 THz. This new ultrathin device architecture, achieving an absorption-bandwidth of one optical octave, demonstrates a major advance toward a synthetic metasurface blackbody absorber in the THz band.
Metamaterial absorbers have been a topic of considerable interest in recent years, with a particular focus on Terahertz (THz) frequencies due to many natural materials having a weak interaction with ...THz light. Great efforts have aimed to expand such THz absorbers to cover a wide bandwidth whilst also being highly efficient. However, many of these require cascaded or stacked multilayer resonant elements, where even a small deviation in the alignment between layers is extremely detrimental to the performance. Here, we propose a bilayer metasurface absorber (thickness ∼ λ/6) that is immune to such layer misalignments capable of exceeding a fractional bandwidth (FWHM) of 100% of the central frequency. The design works due to a novel absorption mechanism based on Salisbury Screen and anti-reflection absorption mechanisms, using fractal cross absorbers to expand the bandwidth. Our work is of particular benefit to developing devices which require ultra-wide bandwidth, such as bolometric sensing and planar blackbody absorbers, with the extremely robust absorption responses being unaffected by any misalignments between layers - a limiting factor of previous absorbers.
In this article a monolithic resonant terahertz sensor element with a noise equivalent power superior to that of typical commercial room temperature single pixel terahertz detectors and capable of ...close to real time read‐out rates is presented. The detector is constructed via the integration of a metamaterial absorber and a micro‐bolometer sensor. An absorption magnitude of 57% at 2.5 THz, a minimum NEP of 37 pW /Hz and a thermal time constant of 68 ms for the sensor are measured. As a demonstration of detector capability, it is employed in a practical Nipkow terahertz imaging system. The monolithic resonant terahertz detector is readily scaled to focal plane array formats by adding standard read‐out and addressing circuitry enabling compact, low‐cost terahertz imaging.
In this article a monolithic resonant terahertz sensor element with a noise equivalent power superior to that of typical commercial room temperature single pixel terahertz detectors and capable of close to real time read‐out rates is presented. The detector is constructed via the integration of a metamaterial absorber and a micro‐bolometer sensor. An absorption magnitude of 57% at 2.5 THz, a minimum NEP of 37 pW /Hz and a thermal time constant of 68 ms for the sensor are measured. As a demonstration of detector capability, it is employed in a practical Nipkow terahertz imaging system. The monolithic resonant terahertz detector is readily scaled to focal plane array formats by adding standard read‐out and addressing circuitry enabling compact, low‐cost terahertz imaging.
Surface enhanced resonance Raman spectroscopy (SERRS) is a powerful molecular sensing tool that can be applied to a number of applications in the field of molecular diagnostics. We demonstrate that ...by using electron beam lithography to manipulate the nanoscale geometry of Ag split-ring resonators we can tune their optical properties such that they exhibit two independently addressable high frequency plasmon resonance modes for SERRS. This tailored multimodal, polarization dependent activity enables the split rings to act as discriminating sensors, with each resonance tuned for a particular sensing purpose. The structures are used as multiwavelength, multianalyte DNA SERRS sensors, with each resonance tuned to both the absorption wavelength of a differently colored Raman reporter molecule and its corresponding laser excitation wavelength. The ability of each resonance to independently sense small concentrations of a single DNA type from within a mixed population is demonstrated. Also shown is the effect of the split ring’s dichroic response on the SERRS signal and the sensor’s limit of detection of each resonance mode (switching its sensory reaction “on” and “off” depending on the orientation of the exciting light).
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