A new process, based on the interaction between Si and N rich gas cluster and post Cu CMP features surface, was integrated in a multi-level Cu interconnect stack using 65 nm design rules. Using the ...same integration scheme as stand-alone SiCN dielectric capping, excellent electrical properties were achieved when the process was implemented with a USG layer on top of a porous Ultra-Low K. Furthermore, 3x electromigration time to failure improvement was evidenced, making the approach very promising to address EM performance requirement for the most advanced technology nodes. Moreover, contrary to PE-CVD CuSiN approach, the process does not depend on Cu crystallographic orientation. Finally, when the implantation process is performed on un-capped ULK, a deep N contamination occurs. Therefore, the process must be optimized to preserve the interest of this technique for the most aggressive architectures.
RESUMEN Este trabajo interroga la condición destituyente de las revueltas chilenas y su aparentemente paradójica propuesta de una nueva Constitución, en relación con la crisis general de la ...gobernabilidad neoliberal contemporanea, y en relación con el agotamiento del modelo juristocrático que ha mantenido capturado al país desde la misma instauración de la Constitución de 1980. El trabajo propone un institucionalismo salvaje basado en una concepción prostética y suplementaria de la ley y de las instituciones, orientada hacia una historicidad del ser en común capaz de profanar la ficción soberana y desbaratar el fetiche de la supuestamente ejemplar transición chilena a la democracia. A partir de esto, el trabajo problematiza la misma forma constitucional, disputando con el "nuevo constitucionalismo espiritual" chileno el estatuto mismo del derecho y su relación con el "pueblo".
Abstract The NEMO-3 results for the double- $$\beta $$ β decay of $$^{150}$$ 150 Nd to the 0 $$^+_1$$ 1 + and 2 $$^+_1$$ 1 + excited states of $$^{150}$$ 150 Sm are reported. The data recorded during ...5.25 year with 36.6 g of the isotope $$^{150}$$ 150 Nd are used in the analysis. The signal of the $$2\nu \beta \beta $$ 2 ν β β transition to the 0 $$^+_1$$ 1 + excited state is detected with a statistical significance exceeding 5 $$\sigma $$ σ . The half-life is measured to be $$T_{1/2}^{2\nu \beta \beta }(0^+_1) = \left 1.11 ^{+0.19}_{-0.14} \,\left( \hbox {stat}\right) ^{+0.17}_{-0.15}\,\left( \hbox {syst}\right) \right \times 10^{20}$$ T 1 / 2 2 ν β β ( 0 1 + ) = 1 . 11 - 0.14 + 0.19 stat - 0.15 + 0.17 syst × 10 20 year, which is the most precise value that has been measured to date. 90% confidence-level limits are set for the other decay modes. For the $$2\nu \beta \beta $$ 2 ν β β decay to the 2 $$^+_1$$ 1 + level the limit is $$T^{2\nu \beta \beta }_{1/2}(2^+_1) > 2.42 \times 10^{20}~\hbox {year}$$ T 1 / 2 2 ν β β ( 2 1 + ) > 2.42 × 10 20 year . The limits on the $$0\nu \beta \beta $$ 0 ν β β decay to the 0 $$^+_1$$ 1 + and 2 $$^+_1$$ 1 + levels of $$^{150}$$ 150 Sm are significantly improved to $$T_{1/2}^{0\nu \beta \beta }(0^+_1) > 1.36 \times 10^{22}~\hbox {year}$$ T 1 / 2 0 ν β β ( 0 1 + ) > 1.36 × 10 22 year and $$T_{1/2}^{0\nu \beta \beta }(2^+_1) > 1.26 \times 10^{22}~\hbox {year}$$ T 1 / 2 0 ν β β ( 2 1 + ) > 1.26 × 10 22 year .
The NEMO 3 detector, which has been operating in the Fréjus underground laboratory since February 2003, is devoted to the search for neutrinoless double-beta decay (beta beta 0v). The half-lives of ...the two neutrino double-beta decay (beta beta 2v) have been measured for 100Mo and 82Se. After 389 effective days of data collection from February 2003 until September 2004 (phase I), no evidence for neutrinoless double-beta decay was found from approximately 7 kg of 100Mo and approximately 1 kg of 82Se. The corresponding limits are T1/2(beta beta0v) > 4.6 x 10(23) yr for 100Mo and T1/2(beta beta 0v) > 1.0 x 10(23) yr for 82Se (90% C.L.). Depending on the nuclear matrix element calculation, the limits for the effective Majorana neutrino mass are < 0.7-2.8 e/v for 100Mo and < 1.7-4.9 eV for 82Se.
Using 9.4 g of
96Zr isotope and 1221 days of data from the NEMO-3 detector corresponding to 0.031 kg y, the obtained
2
ν
β
β
decay half-life measurement is
T
1
/
2
2
ν
=
2.35
±
0.14
(
stat
)
±
0.16
...(
syst
)
×
10
19
yr
. Different characteristics of the final state electrons have been studied, such as the energy sum, individual electron energy, and angular distribution. The 2
ν nuclear matrix element is extracted using the measured
2
ν
β
β
half-life and is
M
2
ν
=
0.049
±
0.002
. Constraints on
0
ν
β
β
decay have also been set.
PDF
