California Streaming Duncan, Elizabeth; Wooninck, Lisa; Laidig, Tom ...
Oceanography (Washington, D.C.),
03/2021, Letnik:
34, Številka:
1
Journal Article
Recenzirano
In October 2020, E/V Nautilus explored the Santa Lucia Bank area and the Channel Islands National Marine Sanctuary (CINMS) and surrounding waters offshore of California. This expedition furthered ...research priorities shared by the West Coast Deep-Sea Coral Initiative, the EXpanding Pacific Research and Exploration of Submerged Systems (EXPRESS) campaign, and other research initiatives to document the distribution of deep-sea resources. Santa Lucia Bank is an area of interest for the development of offshore wind energy and is also within the nominated Chumash Heritage National Marine Sanctuary (CHNMS). Eleven ROV dives were conducted in the designated and proposed national marine sanctuaries to validate seafloor mapping data and habitat suitability models for deep-sea corals and sponges, and to better understand the distribution and connectivity of these habitats via targeted sampling. After exploring the deeper areas of the Santa Lucia Bank and escarpment, deteriorating weather chased us inshore where we completed a short dive in an area surveyed with an autonomous underwater vehicle (AUV) in 2005 and 2018.
Line end shortening in CPL mask technology Conley, Will; Kuijten, Jan Pieter; Verhappen, Arjan ...
Microelectronic engineering,
03/2005, Letnik:
78
Journal Article, Conference Proceeding
Recenzirano
Various types of line ends have been evaluated for either straight CPL mask or hybrid type builds. The authors will focus on image line end shortening and the impact of through dose and focus ...performance for very high NA ArF imaging. Simulations on test structures have been calculated along with in photoresist simulations to predict the impact on process window capability. Test structures have been designed and fabricated into a functional test for evaluation. Process evaluations have been completed and exposure-defocus window calculated.
The resolution enhancement technique (RET) design flow has become a conglomeration of various point tools and methodologies. Deep sub-wavelength design for manufacturing (DFM) requirements have ...forced the design and manufacturing communities into very tight collaboration. The EDA industry is also driven to provide an infrastructure to facilitate communication for these communities. A key part of this infrastructure for communication is a modeling file called the Process Model File (PMF). With the help of new EDA tools and flows, designers are starting to embed design information in manufacturing data, permitting downstream tools to optimize analysis on structures that are critical to the design. The PMF should be regarded as an enabling technology. It is an infrastructure by which critical modeling and recipe information can be passed both upstream and downstream. This channel of communication will allow faster ramp of new technology nodes, as well as doing designs right the first time.
