Review of Scientific Instruments 76 (2005) 083102 A custom, flat field, extreme ultraviolet EUV spectrometer built specifically
for use with low power light sources that operate under ultrahigh ...vacuum
conditions is reported. The spectral range of the spectrometer extends from 4
nm to 40 nm. The instrument optimizes the light gathering power and signal to
noise ratio while achieving good resolution. A detailed description of the
spectrometer and design considerations are presented, as well as a novel
procedure that could be used to obtain a synthetic wavelength calibration with
the aid of only a single known spectral feature. This synthetic wavelength
calibration is compared to a standard wavelength calibration obtained from
previously reported spectral lines of Xe, Ar and Ne ions recorded with this
spectrometer.
After a brief introduction to the NIST EBIT facility, we present the results of three different types of experiments that have been carried out there recently: EUV and visible spectroscopy in support ...of the microelectronics industry, laboratory astrophysics using an x-ray microcalorimeter, and charge exchange studies using extracted beams of highly charged ions.
A custom, flat field, extreme ultraviolet EUV spectrometer built specifically for use with low power light sources that operate under ultrahigh vacuum conditions is reported. The spectral range of ...the spectrometer extends from 4 nm to 40 nm. The instrument optimizes the light gathering power and signal to noise ratio while achieving good resolution. A detailed description of the spectrometer and design considerations are presented, as well as a novel procedure that could be used to obtain a synthetic wavelength calibration with the aid of only a single known spectral feature. This synthetic wavelength calibration is compared to a standard wavelength calibration obtained from previously reported spectral lines of Xe, Ar and Ne ions recorded with this spectrometer.