Regular patterns of ferroelectric PbTiO3 nanostructures (see Figure) with lateral dimensions down to 30–60 nm have been grown onto platinized Si substrates by chemical solution deposition. The high ...registration of the grains is achieved by “top–down”‐generated templates of TiO2 dots as seeds for their deposition. Ferroelectricity was verified by piezoresponse force microscopy.
The objective of these investigations was the development of a technology for the integration of piezoelectric PZT thin films deposited by chemical solution deposition (CSD) on silicon-based ...cantilevers for micromirror and microrelay applications. The fabrication process is presented in detail with attention to the PZT thin film. The electrical properties of these thin films have been studied with hysteresis, capacitance–voltage (
C–
V) and current density–electric field (
S–
E) measurements. Furthermore, laser interferometry investigations on completed microactuators are depicted. For 390
μm long cantilever structures tip deflections up to 20
μm at an applied voltage of 10
V were measured. The piezoelectric coefficient
d
31 was measured to be −12
pC/N. Resonance frequency measurements on a 190
μm long cantilever resulted in a value of 23
kHz.
Chemical solution deposited (CSD) complex oxide thin films attract considerable interest in various emerging fields as for example, fuel cells, ferroelectric random access memories or coated ...conductors. In the present paper the results of soft-X-ray spectroscopy between 280 and 560 eV on the amorphous to crystalline phase transition of ferroelectric Pb(Zr
0.3
Ti
0.7
)O
3
(PZT) thin films are presented. Five CSD samples derived from the same wafer coated with a PZT film pyrolyzed at 350 °C were heat treated at different temperatures between 400 and 700 °C. At first the samples were morphologically and electrically characterized. Subsequently the soft-X-ray absorption and emission experiments were performed at the undulator beamline 8.0 of the Advanced Light Source of the Lawrence Berkeley National Laboratory. Soft-X-ray absorption spectra were acquired for the Ti
L
2,3
-, O K-, and C K-edge thresholds by using simultaneously the total electron yield (TEY) and total fluorescence yield (TFY) detection methods. For two samples, annealed at 400 and 700 °C, respectively, the resonant inelastic soft-X-ray spectroscopy (RIXS) was applied for various excitation energies near the Ti L-, O K-edges. We observed clear evidence of a rutile phase at untypically low temperatures. This rutile phase transforms into the perovskite phase upon increasing annealing temperature. These results are discussed in the framework of current microscopic models of the PZT (111) texture selection.
This paper focuses on the deposition and electromechanical characterization of lanthanum-doped lead hafnate titanate (PLHT) thin films as key material in piezoelectric microelectromechanical systems ...(pMEMS). PLHT (
x
/30/70) and PLHT(
x
/45/55) films with a thickness between 150 nm and 250 nm were deposited by chemical solution deposition (CSD). Thereby
x
varies between 0 and 10% La content. The electrical characterization shows that undoped (
x
=0) PLHT exhibit ferroelectric behavior similar to PZT of the same composition. La doping results in reduced ferroelectric properties and also affects the electromechanical properties. Measurements using a double beam laser interferometer yield a piezoelectric coefficient
d
33
of 60 pm/V, which stays constant with an increasing electric field. This leads to a linear displacement compared to undoped PLHT or conventional PZT films used for MEMS applications.
Dentists' suggestions for the establishment of preventive care were investigated on 3 levels; dentist, dental associations and unions (DAU), and health care system (HCS). Associations between ...categories of suggestions and dentists' characteristics were explored.
A postal survey was sent to 2,075 dentists practicing in Bremen and Lower Saxony. The answers on 3 open-ended questions were analysed in a qualitative manner based on the quality control protocol (QCP) of the Federal Joint Committee. Quantitative methods were used for exploring associations between categories of suggestions and gender as well as age.
Response rate was 33% (n=685). Dentists made 2,120 suggestions (dentist=752, DAU= 574, HCS= 794). The majority of dentists (90%) suggested educating and motivating patients. Dentists stated that support from DAU is needed in educating the public (50%), offering preventive-oriented training (35%), and in advertising for prophylaxis (18%). On the HCS level, about 60% of the suggestions concerned remunerating prophylaxis and expanding the existing bonus system. Significantly more female (p=0.010) and younger dentists (p=0.031) contributed to educating patients than male and older dentists.
Education is the key message of this work. Essential topics such as prevention for elderly and risk groups were not a focal point. Education on the DAU and HCS levels can be realised through organising nation-wide health campaigns. Funding options for prevention and regulating multidisciplinary work between dentists and other health-care providers should be examined. These changes can contribute enormously to further establish prevention.
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