Millimeter wave solid state array technology has broad applicability in areas ranging from radar and nondestructive testing to cancer hypertherapy and plasma diagnostics and is actively under investigation at UC Davis. Phased antenna arrays utilizing Schottky varactor loaded transmission lines as the phase controlling elements have been designed, simulated, fabricated and are being tested. Broadband quasi-optical overmoded waveguide frequency multiplier grid array systems have been designed, simulated, fabricated and are under test with a goal of providing Watt level output powers from 50-200 GHz. Micro-electromechanical systems (MEMS) based switch and capacitor arrays have been designed and fabricated on silicon wafers with traditional IC processing techniques, resulting in devices with physical dimensions on the order of a few tens of microns.