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Burek, Michael J; de Leon, Nathalie P; Shields, Brendan J; Hausmann, Birgit J. M; Chu, Yiwen; Quan, Qimin; Zibrov, Alexander S; Park, Hongkun; Lukin, Mikhail D; Lončar, Marko
Nano letters, 12/2012, Letnik: 12, Številka: 12Journal Article
A variety of nanoscale photonic, mechanical, electronic, and optoelectronic devices require scalable thin film fabrication. Typically, the device layer is defined by thin film deposition on a substrate of a different material, and optical or electrical isolation is provided by the material properties of the substrate or by removal of the substrate. For a number of materials this planar approach is not feasible, and new fabrication techniques are required to realize complex nanoscale devices. Here, we report a three-dimensional fabrication technique based on anisotropic plasma etching at an oblique angle to the sample surface. As a proof of concept, this angled-etching methodology is used to fabricate free-standing nanoscale components in bulk single-crystal diamond, including nanobeam mechanical resonators, optical waveguides, and photonic crystal and microdisk cavities. Potential applications of the fabricated prototypes range from classical and quantum photonic devices to nanomechanical-based sensors and actuators.
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JCR | SNIP | JCR | SNIP | JCR | SNIP | JCR | SNIP |
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