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Ogawa, Etsuji; Ikehashi, Tamio; Saito, Tomohiro; Yamazaki, Hiroaki; Masunishi, Kei; Tomizawa, Yasushi; Ohguro, Tatsuya; Sugizaki, Yoshiaki; Toyoshima, Yoshiaki; Shibata, Hideki
Sensors and actuators. A. Physical., 10/2011, Letnik: 169, Številka: 2Journal Article
A high creep-immunity MEMS actuator is proposed for RF-MEMS tunable capacitor. The creep-immunity is attained using silicon nitride, SiN, for the spring portions, where the stress is concentrated. Compared with an aluminum spring, the creep-induced deformation is reduced by a factor of 23 at 100 °C. We also confirmed by a billion cycle test that the SiN spring does not develop a brittle fracture.
