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  • Effect of sputtering pressu...
    Wang, J.; Ou, X. L.; Zhang, J.; Chen, X. Y.; Zhao, K.; Yang, X. S.; Zhao, Y.

    Journal of materials science, 12/2022, Letnik: 57, Številka: 46
    Journal Article

    Fe(Te,Se) is a simple, iron-based compound that is conducive to the study of superconductivity mechanisms and has potential for large-scale applications. At present, Fe(Te,Se) thin films are primarily prepared using the pulsed laser deposition method. Herein, FeTe 0.6 Se 0.4 films were grown by magnetron sputtering on CaF 2 substrates. The effect of sputtering pressure on the superconductivity of the film was investigated. Excessive pressure caused a higher iron content, which affected the superconductivity and prevented it from completely reaching a zero-resistance state. Δ T c was smaller for the film grown under 0.2 Pa, and its upper critical field reached 144.35 T, which indicates its greater application potential. Our results illustrated that sputtering pressure was a critical process parameter, which provided an important reference for future research to fabricate commercial iron-based superconducting tapes by magnetron sputtering.