Various sample preparation methods have been proposed for X-ray fluorescence analysis of mineral components in a liquid. Among them, the dry spot method is widely used; however, the issue is that the prepared dried residue is non-uniform. We developed nanoimprint films using the thermal nanoimprint method. A uniform and thin dry residue was prepared using the nanoimprint film. The thin film fundamental parameter method, a quantitative analysis method used in X-ray fluorescence analysis, was applied to dried residues to analyze their content. As a result, the analysis value was found to be close to the authentication and inductively coupled plasma atomic emission spectromy analysis values. Display omitted •A parallel cross pattern was formed on a polymer film for liquid sample preparation.•The nanoimprint film produces a thin and uniform dried residue.•Its content is calculated by EDXRF quantitative analysis using thin film FP method.•The analysis value was close to the authentication and ICP-AES analysis values.