E-viri
Recenzirano
-
Chason, E; Mayer, TM; Kellerman, BK; McIlroy, DT; Howard, AJ
Physical review letters, 05/1994, Letnik: 72, Številka: 19Journal Article
We have investigated the temperature-dependent roughening kinetics of Ge surfaces during low energy ion sputtering using energy dispersive x-ray reflectivity. At 150 degreeC and below, the surface is amorphized by ion impact and roughens to a steady state small value. At 250 degreeC the surface remains crystalline, roughens exponentially with time, and develops a pronounced ripple topography. At higher temperature this exponential roughening is slower, with an initial sublinear time dependence. A model that contains a balance between smoothing by surface diffusion and viscous flow and roughening by atom removal explains the kinetics. Ripple formation is a result of a curvature-dependent sputter yield.
